Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties

	Nanotech 2011 Vol. 2 Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational Chapter 5: MEMS & NEMS Fabrication, Devices & Applications
	Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties
Authors:	S.K. Sharma, S. Mohan
Affilation:	Indian Institute of Science, Bangalore, IN
Pages:	336 - 339
Keywords:	shape memory alloys (SMA), magnetron sputtering, focused ion beam (FIB) micro-machining, scanning electron microscopy, nano-mechanical testing
Abstract:	Focused Ion Beam (FIB) micro-machining technique has been used to generate various nano-structures on NiTi shape memory alloy films. The fabrication and nano-mechanical investigations of the nano-structures have been included in this paper.
ISBN:	978-1-4398-7139-3
Pages:	854
Hardcopy:	$199.95

Order:	Mail/Fax Form
Special:	3 CD Set — 15% off with Free Shipping
Up