An Improved Micro Injection Molding Technique for Grating Devices

	Nanotech 2011 Vol. 2 Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational Chapter 5: MEMS & NEMS Fabrication, Devices & Applications
	An Improved Micro Injection Molding Technique for Grating Devices
Authors:	H.S. Li, W.H. Hsieh, L.K.C. Au, K.C. Liu
Affilation:	National Chung Cheng University, TW
Pages:	333 - 335
Keywords:	micro injection molding, grating, sol-gel, nanoimprint
Abstract:	There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this conference.
ISBN:	978-1-4398-7139-3
Pages:	854
Hardcopy:	$199.95

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