Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications

An Improved Micro Injection Molding Technique for Grating Devices

Authors:H.S. Li, W.H. Hsieh, L.K.C. Au, K.C. Liu
Affilation:National Chung Cheng University, TW
Pages:333 - 335
Keywords:micro injection molding, grating, sol-gel, nanoimprint
Abstract:There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this conference.
Order:Mail/Fax Form
© 2016 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map