Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
 
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications
 

An Improved Micro Injection Molding Technique for Grating Devices

Authors:H.S. Li, W.H. Hsieh, L.K.C. Au, K.C. Liu
Affilation:National Chung Cheng University, TW
Pages:333 - 335
Keywords:micro injection molding, grating, sol-gel, nanoimprint
Abstract:There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this conference.
ISBN:978-1-4398-7139-3
Pages:854
Hardcopy:$199.95
 
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