 | Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications |
Comparaison between PDMS and PMMA for MEMS applications | |
| Authors: | C. Benachaiba, M. Bouanini |
| Affilation: | university of bechar, DZ |
| Pages: | 322 - 324 |
| Keywords: | membrane, MEMS, PDMS, PMMA, elastometer |
| Abstract: | The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications. |
| ISBN: | 978-1-4398-7139-3 |
| Pages: | 854 |
| Hardcopy: | $199.95 |
| Order: | Mail/Fax Form |
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