Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Comparaison between PDMS and PMMA for MEMS applications

Authors: C. Benachaiba, M. Bouanini

Affilation: university of bechar, Algeria

Pages: 322 - 324

Keywords: membrane, MEMS, PDMS, PMMA, elastometer

Abstract:
The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.

Comparaison between PDMS and PMMA for MEMS applications

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95