Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications

Comparaison between PDMS and PMMA for MEMS applications

Authors:C. Benachaiba, M. Bouanini
Affilation:university of bechar, DZ
Pages:322 - 324
Keywords:membrane, MEMS, PDMS, PMMA, elastometer
Abstract:The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.
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