Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
 
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications
 

Comparaison between PDMS and PMMA for MEMS applications

Authors:C. Benachaiba, M. Bouanini
Affilation:university of bechar, DZ
Pages:322 - 324
Keywords:membrane, MEMS, PDMS, PMMA, elastometer
Abstract:The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.
Comparaison between PDMS and PMMA for MEMS applicationsView PDF of paper
ISBN:978-1-4398-7139-3
Pages:854
Hardcopy:$199.95
 
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