Authors: N. Fritz, R. Saha, S.A. Bidstrup Allen, P.A. Kohl
Affilation: Georgia Institute of Technology, United States
Pages: 314 - 317
Keywords: lead frame packaging, MEMS packaging, polymer air-gap structures
This research looks at using a polymer Air-gap structures as a cost efficient method of wafer and chip level packaging MEMS devices for a wide range of applications. The presentation will describe how this style of package could be used for a large range of devices such as hermetic or fluidic, and air-gap processing advancements for the wafer level package. The cavities are then investigated for lead frame package purposes. This investigation uses both modeling and experimental techniques to determine the design and rigidity of the cavity under the molding pressure.