 | Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications |
| - | Integration Approaches of Combining Micro and Nano Technologies |
| | A. Rouzaud, Ph. Robert, J.-Ph. Polizzi, N. Sillon |
| | Léti, FR |
| - | Novel Low Temperature Fabrication Method for Label-Free Electronic Sensing of Biomolecules in Nanofluidic Channels with Integrated Electrodes |
| | T. Wynne, X.T. Huang, S. Pennathur |
| | University of California, Santa Barbara, US |
| - | Parallel Fabrication of Single-Walled Carbon Nanotube based Piezoresistive Pressure Sensors |
| | B.R. Burg, T. Helbling, C. Hierold, D. Poulikakos |
| | ETH Zürich, CH |
| - | Design of a g-force meter on Si wafer, based on motor driven by photons |
| | J. Valenzuela, S. Mil’shtein |
| | University of Massachusetts, US |
| - | AC and DC Applications of Three-Dimensional Nano-electro-mechanical-systems |
| | A.B. Kaul, A.R. Khan, K.G. Megerian, L. Bagge, L. Epp |
| | Jet Propulsion Laboratory, US |
| - | Programmable MEMS-Based Silicon Timing Solutions Change the Game |
| | M. Lutz |
| | SiTime Corp, US |
| - | Space Applications for Wireless Sensors |
| | W.C. Wilson, G.M. Atkinson |
| | NASA Langley Research Center, US |
| - | Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors |
| | M.A. Cullinan, R.M. Panas, M.L. Culpepper |
| | Massachusetts Institute of Technology, US |
| - | Tin oxide nanowire sensors for highly sensitive detection of toxic gases |
| | A. Koeck, E. Brunet, C. Griessler, T. Maier, G. Mutinati, S. Steinhauer |
| | AIT Austrian Institute of Technology GmbH, AT |
| - | Design, Fabrication and Characterization of Inverse Adiabatic Fiber-To-Chip Couplers |
| | M. Araghchini, A. Khilo, C.W. Holzwarth, M.S. Dahlem, H.I. Smith, E.P. Ippen, F.X. Kärtner |
| | Massachusetts Institute of Technology, US |
| - | Lead Frame Package of MEMS Devices using Wafer-level, Air-gap Structures |
| | N. Fritz, R. Saha, S.A. Bidstrup Allen, P.A. Kohl |
| | Georgia Institute of Technology, US |
| - | Fracture-induced polymeric grating structures |
| | C.C. Lin, F. Yang, J.W. Chin, L. Sung, S. Lee |
| | National Tsing Hua Univesity, TW |
| - | Comparaison between PDMS and PMMA for MEMS applications |
| | C. Benachaiba, M. Bouanini |
| | university of bechar, DZ |
| - | High-aspect-ratio deep Si etching of micro/nano scale features with SF6 /H2/ O2 plasma, in a low plasma density reactive ion etching system |
| | Z. Sanaee, M. Poudineh, M. Mehran, S. Mohajerzadeh |
| | University of Tehran, IR |
| - | Modularity in the Design and Volume Production of Microfluidic Devices |
| | J. Podczerviensky, L. Levine |
| | ALine, Inc., US |
| - | An Improved Micro Injection Molding Technique for Grating Devices |
| | H.S. Li, W.H. Hsieh, L.K.C. Au, K.C. Liu |
| | National Chung Cheng University, TW |
| - | Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties |
| | S.K. Sharma, S. Mohan |
| | Indian Institute of Science, Bangalore, IN |
| - | Multi-purpose tool for checking the microfabrication products |
| | G. De Pasquale, A. Somà |
| | Politecnico di Torino, IT |
| - | Fabrication and analysis of MEMS test structures for residual stress measurement |
| | A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra |
| | Central Electronics Engineering Research Institute (CEERI/ CSIR), IN |
| - | SC Cavities Fast Tuning System Based on Piezoelectric Actuators |
| | K. Przygoda, T. Pozniak, A. Napieralski, P. Sekalski, M. Grecki |
| | Technical University of Lodz, PL |
| - | Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators |
| | J.J. Khazaai, H. Qu, M. Shillor, L. Smith |
| | Oakland University, US |
| - | A Pressure Sensor Array with Sensing Ragnes Tunable by Drving Frequency |
| | Y.-T. Lai, Y.-J. Yang |
| | National Taiwan University, TW |
| - | Control of MEMS-Technology Axial Topology MicroServos |
| | S.E. Lyshevski |
| | Rochester Institute of Technology, US |
| - | High Sensitivity Dielectric Filled Lamé Mode Resonator for Chemical and Biological Applications |
| | A. Heidari, YJ. Yoon, WT. Park, J.T.M. Lin |
| | Nanyang Technological University, SG |
| - | Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers |
| | K. Maninder |
| | Central Electronics Engineering Research Institute, IN |
| - | Reconfigurable RF Front End Section of Mobile |
| | P. Chawla, N. Saluja, K. Chawla, N. Gupta, A. Chhikara, K. Kaur, S.K. Suman |
| | KITM,kurukshetra, IN |
| - | Gravimeter on a Chip: A Theoretical Study |
| | F. Li, J.V. Clark |
| | Purdue University, US |
| - | A simple and low cost method for fabrication of nanochannels using water soluble nanowires |
| | A. Joshi |
| | Agharkar Research Institute, IN |
| - | A Novel Silicon-based Wideband Nano Switch for RF Applications |
| | Y.X. Yang, R. Ramer |
| | University of New South Wales (UNSW), AU |
| - | Meander based RF MEMS capacitive switch for Mobile Front End Terminal Antenna support |
| | P. Chawla, R. Khanna |
| | KITM, Kurukshetra University Kurukshetra, IN |
| - | Design and Analysis of FBAR switches for RF Front-End Mobile Terminal |
| | P. Chawla, R. Khanna |
| | kurukshetra institute of technology and management, IN |
| - | Weak Magnetic Fields Sensing Using Soft Ferrite Nanoparticles and MEMS |
| | S.E. Lyshevski |
| | Rochester Institute of Technology, US |
| - | Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection |
| | P-Y Lin, Y-J Cheng, S. Kuan, and L-S. Huang |
| | National Tainwan University, TW |
| - | Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology |
| | P. Qu |
| | Oakland University, US |
| - | Calibrating the AFM with Self-Calibratable MEMS: A Theoretical Study |
| | F. Li, J.V. Clark |
| | Purdue University, US |
| - | Comb Finger Capacitive Micro Wind Senor |
| | Z. Zhao, Y. Han, L. Du, Z. Fang, X. Wang |
| | Institute of Electronics,CAS, CN |
| ISBN: | 978-1-4398-7139-3 |
| Pages: | 854 |
| Hardcopy: | $199.95 |
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| Order: | Mail/Fax Form |
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