Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 4: NanoFab: Manufacturing & Instrumentation

Embossed and Intaglio Nano-Patterning using Nanopipette based on the QTF-AFM System

Authors:S.M. An, K.Y. Lee, W.H. Jhe
Affilation:Seoul National University, KR
Pages:265 - 268
Keywords:nano-patterning, nanopipette, emboss/intaglio
Abstract:We demonstrated embossed and intaglio nano-patterning using Nanopipette based on the QTF-AFM (Quartz Tunning Fork-Atomic Force Microscopy) system. Used materials in the patterning system were nanoparticles solution and acetone for delivery solution mica and flat plastic for substrate mica. By realizing the nano-scaled liquid ejection technique with the pulled nanopipette conbined QTF-AFM, various lithography systems can be realized with any liquid solution and sample, such as embossed and intaglio nanolithography. After filling the target solution, the inserting side of aperture was closed with commercial epoxy for the purpose of protection from the evaporation of liquid solution and control of the ejected liquid volume. After forming of capillary condensation between nanopipette tip and surface, we applied electric field to extract out the inside liquid to the substrate. The nano-patterned size could be controlled by the nanopipette’s size and applied electric field.
Embossed and Intaglio Nano-Patterning using Nanopipette based on the QTF-AFM SystemView PDF of paper
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