Patterning Technology for Nanomanufacturing

	Nanotech 2011 Vol. 2 Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational Chapter 4: NanoFab: Manufacturing & Instrumentation
	Patterning Technology for Nanomanufacturing
Authors:	H.I. Smith, M. Walsh, F. Zhang, G. Hourihan, J. Ferrera, M. Jaspan
Affilation:	LumArray, US
Pages:	196 - 199
Keywords:	lithography, patterning, manufacturing
Abstract:	We describe a new approach to patterning that circumvents the limitations of techniques that were developed for the semiconductor industry. The new approach, zone-plate-array lithograhy (ZPAL)will enable an expansion of applications of nanoscale science and engineering
ISBN:	978-1-4398-7139-3
Pages:	854
Hardcopy:	$199.95

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