Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
 
Chapter 4: NanoFab: Manufacturing & Instrumentation
 

Application of focused ion beam technology for photonic nanostructures

Authors:F. Ay, V.J. Gadgil, D. Geskus, S. Aravazhi, K. W├Ârhoff, M. Pollnau
Affilation:MESA+ institute of nanotechnology, University of Twente, NL
Pages:200 - 203
Keywords:FIB, photonic devices
Abstract:Al2O3 and KY(WO4)2 are promising materials for photonic applications with excellent optical properties and of interest for obtaining on chip resonator structures. However, there is no method available to fabricate these structures except FIB technology. We will discuss strategies to optimize the nano-structuring processes that are strongly dependent on the geometry of the desired structure. Furthermore, we will report our recent results on utilization and optimization of the focused ion beam technique for fabrication of nano-structures in integrated photonic devices on several material platforms such as amorphous Al2O3 and crystalline KY(WO4)2
ISBN:978-1-4398-7139-3
Pages:854
Hardcopy:$199.95
 
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