Authors: I.V. Veryovkin, S.V. Baryshev, A.V. Zinovev, C.E. Tripa, Q. Peng, J.W. Elam, M.J. Pellin
Affilation: Argonne National Laboratory, United States
Pages: 24 - 27
Keywords: three dimensional mass spectrometry, depth resolution, lateral resolution
Depth resolution on the order of a few atomic layers has been demonstrated by initial tests of the dual beam sputter depth profiling with the SARISA laser post-ionization secondary neutral mass spectrometry instrument, which was applied to characterize a stack of 16 alternating MgO/ZnO layers grown by atomic layer deposition on Si substrate. At the conference, these results will be presented together with results of lateral resolution tests, currently under way, and discussed in view of three-dimensional mass spectrometry on nanometer scale.