Nano Science and Technology Institute
Nanotech 2011 Vol. 1
Nanotech 2011 Vol. 1
Nanotechnology 2011: Advanced Materials, CNTs, Particles, Films and Composites
Chapter 1: Nanoscale Materials Characterization

Laser Postionization Secondary Neutral Mass Spectrometry for Analysis on the Nanometer-Scale – the Followup

Authors:I.V. Veryovkin, S.V. Baryshev, A.V. Zinovev, C.E. Tripa, Q. Peng, J.W. Elam, M.J. Pellin
Affilation:Argonne National Laboratory, US
Pages:24 - 27
Keywords:three dimensional mass spectrometry, depth resolution, lateral resolution
Abstract:Depth resolution on the order of a few atomic layers has been demonstrated by initial tests of the dual beam sputter depth profiling with the SARISA laser post-ionization secondary neutral mass spectrometry instrument, which was applied to characterize a stack of 16 alternating MgO/ZnO layers grown by atomic layer deposition on Si substrate. At the conference, these results will be presented together with results of lateral resolution tests, currently under way, and discussed in view of three-dimensional mass spectrometry on nanometer scale.
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