Nano Science and Technology Institute
Nanotech 2010 Vol. 3
Nanotech 2010 Vol. 3
Nanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy
Chapter 2: Bio Analytical Instrumentation

Nanoparticle size and shape evaluation using the TSOM optical microscopy method

Authors:R. Attota, R.M. Silver, A. Vladar
Affilation:NIST, US
Pages:172 - 175
Keywords:TSOM, nanoparticle, nanometrology, measurement, metrology
Abstract:We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning optical microscope (TSOM - pronounced as ‘tee-som’) images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanomanufacturing, defect analysis, semiconductor process control, and biotechnology. In the current paper we present nanoparticle size and shape evaluation using the TSOM method.
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