Nanotech 2010 Vol. 3
Nanotech 2010 Vol. 3
Nanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy

Bio Analytical Instrumentation Chapter 2

Nanoparticle size and shape evaluation using the TSOM optical microscopy method

Authors: R. Attota, R.M. Silver, A. Vladar

Affilation: NIST, United States

Pages: 172 - 175

Keywords: TSOM, nanoparticle, nanometrology, measurement, metrology

Abstract:
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning optical microscope (TSOM - pronounced as ‘tee-som’) images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanomanufacturing, defect analysis, semiconductor process control, and biotechnology. In the current paper we present nanoparticle size and shape evaluation using the TSOM method.

Nanoparticle size and shape evaluation using the TSOM optical microscopy method

ISBN: 978-1-4398-3415-2
Pages: 880
Hardcopy: $189.95