Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

Micro & Nano Fluidics Chapter 8

Effect of laser processing parameters and glass type on topology of micro-channels

Authors: A. Ben Azouz, D. Brabazon, M. Vázquez, M. Macka

Affilation: Dublin City University, Ireland

Pages: 496 - 499

Keywords: pulsed CO2 laser, micro-fluidics, micro-channel, glasses, chemical detection

Abstract:
Traditional techniques to manufacture micro-fluidic devices are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative technique for micro-fabrication of devices. This paper presents the fabrication of 3-D micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. Results showed that quartz and fused-silica glasses provided better channel topologies for chemical sensing applications.

Effect of laser processing parameters and glass type on topology of micro-channels

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95