Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 8: Micro & Nano Fluidics

Effect of laser processing parameters and glass type on topology of micro-channels

Authors:A. Ben Azouz, D. Brabazon, M. Vázquez, M. Macka
Affilation:Dublin City University, IE
Pages:496 - 499
Keywords:pulsed CO2 laser, micro-fluidics, micro-channel, glasses, chemical detection
Abstract:Traditional techniques to manufacture micro-fluidic devices are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative technique for micro-fabrication of devices. This paper presents the fabrication of 3-D micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. Results showed that quartz and fused-silica glasses provided better channel topologies for chemical sensing applications.
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