Effect of laser processing parameters and glass type on topology of micro-channels

	Nanotech 2010 Vol. 2 Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational Chapter 8: Micro & Nano Fluidics
	Effect of laser processing parameters and glass type on topology of micro-channels
Authors:	A. Ben Azouz, D. Brabazon, M. Vázquez, M. Macka
Affilation:	Dublin City University, IE
Pages:	496 - 499
Keywords:	pulsed CO2 laser, micro-fluidics, micro-channel, glasses, chemical detection
Abstract:	Traditional techniques to manufacture micro-fluidic devices are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative technique for micro-fabrication of devices. This paper presents the fabrication of 3-D micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. Results showed that quartz and fused-silica glasses provided better channel topologies for chemical sensing applications.
ISBN:	978-1-4398-3402-2
Pages:	862
Hardcopy:	$189.95

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