Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

Micro & Nano Fluidics Chapter 8

Novel ultra-fine hollow needles formed on Silicon membranes

Authors: Z. Sanaee, S. Mohajerzadeh

Affilation: University of Tehran, Iran, Islamic Republic of

Pages: 484 - 487

Keywords: hollow needles, high precision etching, capacitance behavior, liquid

Abstract:
In this paper we report the realization of record-small hollow needles. The fabrication process does not need a three-dimensional lithography and uses a high precision deep vertical etching in a hydrogenation assisted ion etching unit. The formation of hollow structures is possible using a small angle deposition method. The hollow structures have been employed to realize liquid-included capacitors where a considerable response to external inclinaiton is measured. The capillary force is an unwanted effect in such a structure where liquid-transfer through little holes is desired. By proper using of metal coating we have controlled this effect.

Novel ultra-fine hollow needles formed on Silicon membranes

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95