Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 8: Micro & Nano Fluidics

Design of a normally closed piezoelectric micro valve

Authors:S. Zähringer, M. Menacher, P. Kirchner, N. Schwesinger
Affilation:Technische Universitaet Muenchen, DE
Pages:448 - 451
Keywords:piezoelectric, normally closed, micro valve
Abstract:In a previously published paper a piezoelectric actuator using surface electrodes was investigated in a macro-microscopic approach. Bases on those results a normally closed piezoelectric micro valve was devoloped. Therefore the electrode structures were minimized and their functionality verified. Various process optimizations steps were investigated. New assembling techniques, using primarly micro contact printing technologies were developed. Because of the new actuation principle a very simple micro valve design could be developed, ommitting the need of passive membrane. Functionality test of the micro valve are currently underway.
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