Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 6: MEMS & NEMS Devices

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

Authors:T. Sulzbach, W. Engl, R. Maier
Affilation:Nanoworld Services GmbH, DE
Pages:378 - 381
Keywords:cantilever, array, AFM, piezoresistor, actuator, tip
Abstract:Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control which is demonstrated in parallel surface imaging experiments. The probe concept and fabrication is explained as well as the probe characteristics and first application results.
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