Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Devices Chapter 6

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

Authors: T. Sulzbach, W. Engl, R. Maier

Affilation: Nanoworld Services GmbH, Germany

Pages: 378 - 381

Keywords: cantilever, array, AFM, piezoresistor, actuator, tip

Abstract:
Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control which is demonstrated in parallel surface imaging experiments. The probe concept and fabrication is explained as well as the probe characteristics and first application results.

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95