Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

	Nanotech 2010 Vol. 2 Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational Chapter 6: MEMS & NEMS Devices
	Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy
Authors:	T. Sulzbach, W. Engl, R. Maier
Affilation:	Nanoworld Services GmbH, DE
Pages:	378 - 381
Keywords:	cantilever, array, AFM, piezoresistor, actuator, tip
Abstract:	Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control which is demonstrated in parallel surface imaging experiments. The probe concept and fabrication is explained as well as the probe characteristics and first application results.
ISBN:	978-1-4398-3402-2
Pages:	862
Hardcopy:	$189.95

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