Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 6: MEMS & NEMS Devices

Gentle Micropump based on Microelectromagnetic Actuator

Authors:A.T. Al-Halhouli, A. Waldschik, M.I. Kilani, S. Büttgenbach
Affilation:Technische Universität Braunschweig, DE
Pages:340 - 343
Keywords:microactuator, electromagnetic, pump
Abstract:This work presents the fabrication and development of a new multifunction micropump based on integrated electromagnetic microactuator. The novel design consists of a fluidic chip, two microfabricated polymer magnets and chip cover. These components form a micropump that can be used as a mixer also. The electromagnetic pumping concept depends on controlling the rotation of two hard magnets (pistons) placed in an annular channel in opposing polarity under the influence of a moving electromagnetic field. The microfabricated electromagnetic pump is recently tested for pumping water under two energization schemes: digital (energization on steps) and analog energization. The results showed that the magnet can push the water along the channel at current supply of 100 mA. However, the energization schemes are under optimization and development to realize multifunction electromagnetic actuated fluidic chip.
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