Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Devices Chapter 6

Frequency-Interleaved MEMS Ultrasound Transducer

Authors: S-J Chen, Y. Choe, E.S. Kim

Affilation: University of Southern California, United States

Pages: 312 - 315

Keywords: MEMS ultrasound transducer, piezoelectric, frequency-interleaved, array of cantilevers

Abstract:
This paper presents an ultra-sensitive, broad-bandwidth ultrasound transducer based on frequency interleaving of resonant transducers. A large number of cantilever-like diaphragm transducers with piezoelectric ZnO films have been optimally connected in series and parallel, so that the sensitivity as a receiver and the sound output as a transmitter are measured to be about 30 times larger than those of a single transducer. The interleaving of the transducers not only increases the sensitivity but also broadens the useable bandwidth greatly. Each individual transducer’s sound pressure output was measured about 3 mm away from the transducer in an open field with a calibrated microphone. A single transducer was measured to produce 0.8Pa at 22kHz when it was driven with 75Vpeak-to-peak , while it was measured to have a receiving sensitivity of 100μV/Pa at 22kHz. When 16 such transducers were connected in parallel, both the sound output and the sensitivity were improved to 4Pa and 1.05mV/Pa, respectively. When 64 such transducers were connected in parallel, followed by 4 such sets in series, the sound output and the sensitivity were improved to 10Pa and 2.9mV/Pa, respectively. The useable bandwidth also was greatly improved.

Frequency-Interleaved MEMS Ultrasound Transducer

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95