MEMS & NEMS Devices – TechConnect Briefs

Micromachined Glass-Blown 3-D Spherical Shells as Mechanical Vibratory Elements

Prikhodko I.P., Trusov A.A., Zotov S.A., Shkel A.M., University of California Irvine, US

This paper reports a non-contact experimental characterization of resonant modes in micromachined glass-blown spherical shells, enabling new architectures of vibratory 3-D MEMS for signal processing, timing, and inertial applications. Wafer-scale glassblowing was previously developed for [...]

Carbon-based Nanoelectronic Devices for Space Applicatoins

Kaul A.B., Khan A.R., Megerian K.G., von Allmen P., Bagge L., Epp L., Baron R.L., Jet Propulsion Laboratory, US

The microelectronics industry based on Silicon (Si) continues to push the limits on scaling, which has created unique opportunities for nanoscale materials, such as carbon nanotubes (CNTs) and carbon nanofibers (CNFs). We will describe our [...]

Modeling of a Surface Acoustic Wave Strain Sensor

Wilson W.C., Atkinson G.M., NASA Langley Research Center, US

NASA’s Integrated Vehicle Health Monitoring (IVHM) project is investigating new detection technologies that will increase aviation safety by monitoring the structural health of aerospace vehicles during flight. These new technologies must be rugged, light weight [...]

Frequency-Interleaved MEMS Ultrasound Transducer

Chen S.J., Choe Y., Kim E.S., University of Southern California, US

This paper presents an ultra-sensitive, broad-bandwidth ultrasound transducer based on frequency interleaving of resonant transducers. A large number of cantilever-like diaphragm transducers with piezoelectric ZnO films have been optimally connected in series and parallel, so [...]

High Fidelit Loud Microspeaker Based on PZT Bimorph Diaphragm

Choe Y., Chen S.J., Kim E.S., University of Southern California, US

This paper describes a microspeaker (composed of a 8mm square mechanically-polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 11 kHz. A bimorph diaphragm is formed by [...]

Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch

Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Jang W.S., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kang T.Y., National Nanofab Center, KR

Uncooled microbolometer has the various applications in many commercial and military applications. Among many sensor materials, amorphous Si have been widely used as sensor materials for their good TCR (Temperature Coefficient of Resistance), mechanical strength, [...]

Arrayed, Piezoelectrically-Actuated Mirrors and Gratings for Spectrometer

Chen S.J., Chi D., Lo J., Kim E.S., University of Southern California, US

This paper describes a technology for a compact spectrometer based on a 2D piezoelectric mirror and/or grating array. The piezoelectric mirror/grating array is composed of angularly movable, 2-D array of micromirrors/microgratings that is supported on [...]

A MEMS-Based Wide-Band Multi-State Power Attenuator for Radio Frequency and Microwave Applications

Iannacci J., Faes A., Mastri F., Masotti D., Rizzoli V., Fondazione Bruno Kessler - FBK, IT

We propose the implementation of a widely reconfigurable broad-band power attenuator for Radio Frequency (RF) and Microwave signals, entirely based on the RF-MEMS surface micromachining technology available at FBK in Italy. The network realizes a [...]

Design of compact, high capacitance ratio MEMS switch for X – Band applications using high-k dielectric materials

Maninder K., CEERI, IN

This paper presents the design optimization of Symmetric Toggle RF MEMS Switch (STS). STS is based on 50 ohm CPW configuration with torsion springs of movable membrane anchored to the ground planes of CPW. The [...]

One-chip MOS Structure for Temperature Flow Sensor

Husak M., Boura A., Jakovenko J., Czech Technical University in Prague, CZ

There is presented a one-chip MOS structure of anemometric sensor system in the paper. The geometric arrangement of temperature sensors allows measurement of temperature gradient. Temperature gradient allows computation of direction of air flow over [...]

Gentle Micropump based on Microelectromagnetic Actuator

Al-Halhouli A.T., Waldschik A., Kilani M.I., Büttgenbach S., Technische Universität Braunschweig, DE

This work presents the fabrication and development of a new multifunction micropump based on integrated electromagnetic microactuator. The novel design consists of a fluidic chip, two microfabricated polymer magnets and chip cover. These components form [...]

Investigation of Stress in AlN Thin Films for Piezoelectric MEMS

Sah R.E., Kirste L., Baeumler M., Hiesinger P., Cimalla V., Lebedev V., Baumann H., Fraunhofer Institute for Applied Solid State Physics, DE

Wurtzite type AlN thin films have recently become of great interest in microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) for sensing applications such as chemical and biological sensing, electrometry, and scanning probe techniques. As-grown films [...]

Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering

Dudde R., Kaden D., Quenzer H.-J., Wagner B., Fraunhofer ISIT, DE

Crack and void free polycrystalline PZT films in the range of 2 µm to 6 µm have been successfully deposited on silicon wafers using a novel high rate gas flow sputtering process. The development of [...]

Design and Control of a Zero Voltage Switching MEMS DC-DC Power Converter

Ghandour S., Despesse G., Basrour S., CEA-LETI, FR

In this paper, we present the modelling, the design, and the control of a DC-DC voltage converter using a MEMS variable capacitor. We estimate, for a 12V-10V step-down converter, an efficiency of 88% and a [...]

A current controlled plasma-on-a-chip for atmospheric plasma generation

Park H., Jeong J., Kim Y., Hongik University, KR

We present a plasma-on-a-chip operated in a current controlled bias scheme for atmospheric plasma generation. The plasma-on-a-chip was fabricated using micromachining techniques and includes an array of vertically formed micro gaps between an anode and [...]

Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications

Chakraborty S., Bhattacharyya T.K., Indian Institute of Technology (IIT), Kharagpur, IN

This paper presents in brief the design, analysis and fabrication of surface micro-machined cantilever based binary logic inverter and universal gate for low frequency signal processing circuits in MEMS based sensors. The paper attempts to [...]

Using MEMS as Self-Calibrating Force-Displacement Transducers: A Computational Study

Clark J.V., Li F., Lee H., Kadasia K., Purdue University, US

Accurate and precise measurements of forces and displacements are critical to the improved understanding, discovery, and prediction of micro- and nanoscale phenomena. Since geometric and material properties of MEMS vary from run to run, it [...]

Towards Microrobots with Insect-Like Dexterity

Clark J.V., Li F., Clark J.V., Purdue University, US

In this paper we analyze a pioneering mechanism ‘solid state muscles’ that facilitates insect-like dexterity for autonomous and robust microscale robotics. The results of our efforts are expected to at lead to the following microrobot [...]

Nanolab System for Nanoelectronics and Sensors

Dimonte A., Demarchi D., Civera P., Piccinini G., Politecnico di Torino, IT

This project idea is the implementation of a complete and general system for the realization of nanodevices based on nanogaps (small gaps in a gold wire) exploited with a feedback controlled circuit. The system, built [...]

Triaxial Accelerometer for Placement Inside the Ear Canal

Kwa T., Pender G., Letterneau J., Endevco Corporation, Meggitt Sensing Systems, US

A second generation MEMS-based in-ear shock measurement system fitting deep into the ear canal has been developed to measure traumatic brain injury (TBI). It consists of the world’s smallest triaxial accelerometer die, a shielded flex [...]

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

Sulzbach T., Engl W., Maier R., Nanoworld Services GmbH, DE

Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an [...]

Flexible Micropost Arrays For Studying Traction Forces Of Vascular Smooth Muscle Cells

Cheng Q., Sun Z., Meininger G.A., Almasri M., University of Missouri, US

This paper describes the design, modeling, fabrication and characterization of micromachined arrays of high density 3-dimensional microposts fabricated using flexible silicone elastomers for studying traction forces generated by vascular smooth muscle cell. It also reports [...]

A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope

Sharaf A., Sedky S., Serry M., Elshurafa A., Ashour M., Habib S.E.-D., American University in Cairo, EG

Gyroscopes are sensors that measure rotation rate and are extremely important in many applications such as navigation and vehicle stability control. Despite being manufactured in many technologies in various shapes and sizes, micro-electromechanical (MEMS) gyroscopes [...]

Nano-porous poly-silicon gated ion selective field effect transistors

Zehfroosh N., Shahmohammdi M., Mohajerzadeh S., University of Tehran, IR

We report the realization of ultra high sensitivity ion-selective field effect transistors (ISFET) devices by means of a nano-porous silicon structures placed on the gate region. Thanks to the presence of a nano-porous polysilicon film [...]

Design and Fabrication of the Sensor for Measuring the Human Bladder Volume

Lee S., Jun S., Kim S., Kim S., Choi B., Sogang University, KR

This paper presents the result of study on the development of a bladder volume sensor. Previous studies focus on the development of an inner bladder pressure sensor. But there are some difficulties about the measurement [...]

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