 | Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS Fab: Design, Manufacture, Instrumentation |
Practical issues with ion beam milling in acoustic resonator technologies | |
| Authors: | S. Mishin, Y. Oshmyansky, F. Bi |
| Affilation: | Advanced Modular Systems, Inc, US |
| Pages: | 288 - 291 |
| Keywords: | FBAR, trimming, ion milling, SiO2, AlN |
| Abstract: | A practical approach to addressing production issues of thickness trimming was demonstrated through two-step trimming, send-ahead wafer, and deposition/trimming cluster tool. Thickness control necessary in SAW/BAW technology was demonstrated. |
| ISBN: | 978-1-4398-3402-2 |
| Pages: | 862 |
| Hardcopy: | $189.95 |
| Order: | Mail/Fax Form |
| Special: | 3 CD Set — 15% off with Free Shipping |
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