Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS Fab: Design, Manufacture, Instrumentation Chapter 5

Practical issues with ion beam milling in acoustic resonator technologies

Authors: S. Mishin, Y. Oshmyansky, F. Bi

Affilation: Advanced Modular Systems, Inc, United States

Pages: 288 - 291

Keywords: FBAR, trimming, ion milling, SiO2, AlN

Abstract:
A practical approach to addressing production issues of thickness trimming was demonstrated through two-step trimming, send-ahead wafer, and deposition/trimming cluster tool. Thickness control necessary in SAW/BAW technology was demonstrated.

Practical issues with ion beam milling in acoustic resonator technologies

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95