Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS Fab: Design, Manufacture, Instrumentation

Practical issues with ion beam milling in acoustic resonator technologies

Authors:S. Mishin, Y. Oshmyansky, F. Bi
Affilation:Advanced Modular Systems, Inc, US
Pages:288 - 291
Keywords:FBAR, trimming, ion milling, SiO2, AlN
Abstract:A practical approach to addressing production issues of thickness trimming was demonstrated through two-step trimming, send-ahead wafer, and deposition/trimming cluster tool. Thickness control necessary in SAW/BAW technology was demonstrated.
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