 | Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS Fab: Design, Manufacture, Instrumentation |
| - | Influence of resist composition on demolding force in UV nanoimprint lithography |
| | A. Amirsadeghi, J. Lee, S. Park |
| | Louisiana State University, US |
| - | Maskless Lithography Using Patterned Amorphous Silicon Layer Induced by Femtosecond Laser Irradiation |
| | A. Kiani, K. Venkatakrishnan, B. Tan |
| | Ryerson University, CA |
| - | Micro Crumples for Self-Assembly of Field Emission Devices |
| | S. Sambandan |
| | Palo Alto Research Center, US |
| - | Monolithic CMOS MEMS technology development: A piezoresistive-sensors case study |
| | A. Chaehoi, D. Weiland, D. O’Connell, S. Bruckshaw, S. Ray, M. Begbie |
| | Institute for System Level Integration, UK |
| - | Practical issues with ion beam milling in acoustic resonator technologies |
| | S. Mishin, Y. Oshmyansky, F. Bi |
| | Advanced Modular Systems, Inc, US |
| - | Investigation on correlation between cold/hot weld line mechanical properties and micro injection molding processing parameters |
| | L. Xie, D. Zhu, G. Ziegmann, L. Steuernagel |
| | Technology University of Clausthal, DE |
| - | Machining Using Fast Tool Servo Combined with Ultrasonic Vibrator |
| | S.C. Choi, Lu Hong, D.W. Lee |
| | Pusan University, KR |
| ISBN: | 978-1-4398-3402-2 |
| Pages: | 862 |
| Hardcopy: | $189.95 |
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| Order: | Mail/Fax Form |
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