Authors: S.-W. Kang, D. Banerjee
Affilation: Texas A&M University, United States
Pages: 218 - 222
Keywords: Derjaguin-Muller-Toporov, contact theory, vibration, beam theory
Micro-cantilevers are frequently used as probes for micro-electromechanical systems (MEMS) based sensing applications. Usually micro-cantilever based sensors work by detecting changes in cantilever vibration modes (e.g., bending or torsional vibration frequency) or surface stresses - when a target analyte is absorbed on its surface. The catalyst for chemical reactions with specific analyte can be deposited by Dip-Pen Nanolithography (DPN) technique. In this study, we simulate the vibration mode in nano-patterning process based on Point-Mass Model (or Lumped Parameter Model). The results of simulation indicate the stability of writing and reading mode in DPN process under a particular driving frequency. In addition, we analyze the sensitivity of tip-sample interaction force in fluid (ink solution) by utilizing the Derjaguin-Muller-Toporov (DMT) contact theory.