Authors: F. Li, J.V. Clark
Affilation: Purdue University, United States
Pages: 585 - 588
Keywords: electrostatics modeling, MEMS devices, online tool, Schwarz-Christoffel mapping
We present an online software tool that quickly and accurately models and simulates the electrostatic properties, such as capacitance, charge distribution, and electrostatic force, of microdevices in 2.5D domain with Dirichlet boundary conditions by using Schwarz-Christoffel mapping (SCM). The tool can be applied to arbitrary simply-connected geometries, and treats planar fringing field at corners exactly. For a test case, we model and simulate a MEMS torsional actuator. The maximum relative error of capacitance between our method and the analytical method that does not include fringing fields is 1.4%. And our tool is ~1000 times faster than 2.5D FEA tool.