Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 10: Computational Methods, Simulation & Software Tools

Analytic Modeling of BioFET as a pH Sensor

Authors:Y. Song, Y. Guan, J. Zhang, J. He, X. Zhang, X. Lin
Affilation:Peking University, CN
Pages:717 - 720
Keywords:device physics, modeling, bio-FET, pH sensor
Abstract:In this paper, the analytic modeling of the BioFET as a pH sensor has been developed from the complete surface potential equation and channel expression. Combining the physical MOSFET theory with electrochemistry of the electrolyte, the expressions of both the potential drop in the electrolyte and the surface potential of the substrate are obtained, respectively, by using an analytic approximation. The drain current and signal noise ratio (SNR) variations with different values of the electrolyte are also discussed for different electrolyte, providing an order condition to gain preferable performance. The modeling results are also verified by the numerical simulation, proving the model validity.
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