Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 10: Computational Methods, Simulation & Software Tools

SugarCube: An Online Tool for Investigating the Performance of Ready-Made Parameterized MEMS

Authors:P. Marepalli, J.V. Clark
Affilation:Purdue University, US
Pages:689 - 692
Keywords:readymade-MEMS, library, user-friendly, efficient
Abstract:We present an online tool - SugarCube which facilitates the parameterization of ready-made MEMS. Using this tool one can investigate the performance of parameterized MEMS which are available in the form of hierarchical libraries. This tool is made so simple that it does not require any programming, manual reading or expertise to use making it amenable to novices from all educational levels and also to experts who do not have time or desire to learn complex tools. This tool is available online at with remote computation. SugarCube is a front end of Sugar modeling and simulation engine. It has hierarchical library of commonly-used MEMS, many of which are previously published in literature. Once a user selects a system to explore, he can modify the parameters (geometric and material) and inspect the performance of the tool with these new conditions. Different kinds of analysis like static, transient and frequency are possible. The numerical results are plotted and the deflected MEMS is displayed. The data can be saved and downloaded.
SugarCube: An Online Tool for Investigating the Performance of Ready-Made Parameterized MEMSView PDF of paper
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