Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

Electronics & Photonics Chapter 1

Backside Nanoscale Texturing to Improve IR Response of Silicon Photodetectors

Authors: L. Forbes, M.Y. Louie

Affilation: Oregon State University, United States

Pages: 9 - 12

Keywords: texturing, silicon, near infrared, photodetectors

Abstract:
When the silicon is not strongly absorbing in the near infrared a back side textured surface works in conjunction with a totally internally reflecting front side surface to best increase the absorption of near infrared photons. This results in multiple internal reflections and light trapping. This paper describes a simple analysis technique and design considerations in the use of backside texturing to improve the near infrared(IR) response of silicon photodiodes, photodetectors, solar cells and imagers. A large enhancement in the near infrared responsivity of silicon photodetectors can be achieved.

Backside Nanoscale Texturing to Improve IR Response of Silicon Photodetectors

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95