Authors: V. Cech, R. Trivedi, S. Lichovnikova, L. Hoferek
Affilation: Brno University of Technology, Czech Republic
Pages: 858 - 861
Keywords: plasma, thin film, nanostructure
Plasma polymerization is a thin film-forming process based on atomic polymerization. Plasma polymer films deposited from organosilicon monomers constitute a special class of dielectric coatings with controllable organic/inorganic character and cross-linking that enable optimization of their dielectric, optical, mechanical, and surface properties. Next progress was aimed at construction of functionally nanostructured films in a form of multilayers, with sharp of diffusive interfaces, and gradient coatings of physicochemical properties continuously varying from material A to material B.