Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites

Nanostructured Coatings, Surfaces & Films Chapter 4

Correlation between the oxygen content and the structure of AlCrSiOxN(1-x) thin films deposited by pulsed DC magnetron sputtering

Authors: H. Najafi, A. Karimi, M. Morstein, H. Najafi

Affilation: École Polytechnique Fédérale de Lausanne, Switzerland

Pages: 631 - 634

Keywords: oxynitride, pulsed DC sputtering, nanoindentation

Abstract:
Due to their good mechanical properties as well as high temperature oxidation resistance, multi element oxynitride thin films have attracted more attention for applications in cutting and forming tools. Nanocomposite coatings represent a new generation of materials. They are composed of at least two separated phases with a nanocrystalline and/or amorphous structure and New unique physical and functional properties of the nanocomposite coatings are a main driving force stimulating the development of these materials.

Correlation between the oxygen content and the structure of AlCrSiOxN(1-x) thin films deposited by pulsed DC magnetron sputtering

ISBN: 978-1-4398-3401-5
Pages: 976
Hardcopy: $189.95