Nano Science and Technology Institute
Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites
Chapter 4: Nanostructured Coatings, Surfaces & Films

Novel Metal Oxide Deposition Method to Fabricate Nanostructures

Authors:R. Mansouri, M. Sandooghchian, M.R. Mansouri
Affilation:Kerman Semiconductor Company and university of Payem -e- Noor, IR
Pages:647 - 650
Keywords:nano, deposition
Abstract:by this project deposition of metal oxide like SnO2 was deposited on Si wafer by applying novel developed method and then ZnO pudgy nanopillars were fabricated on the very deposited layer. this new developed approach gives us to fabricate various nanostructures and addition new application and properties of them. However, this new method arise some advantages, which are brought following: • Easy and cheap process • Low waste • Fabricating some new nanostructures, for example aligned nanowire of ZnO by deposition of gold has been fabricated in pervious.
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