Nano Science and Technology Institute
Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites
Chapter 3: Nanoparticle Synthesis & Applications

Synthesis of highly-doped silicon and germanium nanoparticles in a low-pressure plasma-reactor for thermoelectric and solar applications

Authors:H. Grimm, N. Petermann, A. Gupta, H. Wiggers
Affilation:University of Duisburg-Essen, DE
Pages:410 - 412
Keywords:silicon, germanium, doped, nanoparticles, synthesis, microwave, plasma, reactor
Abstract:Microwave-plasma induced thermal decomposition of gaseous precursors like germane (GeH4) and silane (SiH4) is used to synthesize semiconductor nanoparticles for thermoelectric and thermal applications. P and n-doping can be achieved by mixing silane and germane with diborane (B2H6) and phosphine (PH3), respectively. Adjusting the fraction of the respective precursor in the gas phase is used to control the dopant concentration.
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