Nano Science and Technology Institute
Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites
Chapter 2: Carbon Nano Structures & Devices

Fabrication of Nanoporous Ultrananocrystalline Diamond Membranes

Authors:O.V. Makarova, R. Divan, N. Moldovan, C.-M. Tang
Affilation:Creatv MicroTech, Inc, US
Pages:242 - 245
Keywords:nanocrystalline diamond, nanoporous membranes, e-beam lithography, RIE
Abstract:Nanoporous membranes engineered to mimic natural filtration systems can be used in smart implantable drug delivery systems, bioartificial organs, and other novel nano-enabled medical devices. The ultrananocrystalline diamond (UNCD) porous membranes will open new opportunities in implant medicine because of the highest, unmatched by other materials degree of biocompatibility and anti-biofouling. We report our results on high porosity high-aspect-ratio UNCD membranes fabricated using e-beam lithography, reactive ion etching and laser writing.
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