Nano Science and Technology Institute
Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites
 
Chapter 1: Nanoscale Materials Characterization
 

Advances in Helium Ion Microscopy for High Resolution Imaging and Material Modification

Authors:W. Thompson, J. Notte, L. Scipioni, M. Ananth, L. Stern, S. Sijbrandij, C. Sanford
Affilation:Carl Zeiss SMT, US
Pages:25 - 28
Keywords:helium ion microscopy, sub-nanometer image resolution, graphene, soft materials collagen fibers
Abstract:The helium ion microscope routinely obtains sub-nanometer resolution on uncoated soft materials with a high signal to damage ratio. In addition to its high resolution imaging capability, the microscope has been successful at sub-nanometer film thickness determination, the patterning of 5 nm free standing graphene wires and the ion induced deposition of a 30nm, 6 micron high, free standing tungsten pillar. We will discuss the microscope and these various recent applications.
Advances in Helium Ion Microscopy for High Resolution Imaging and Material ModificationView PDF of paper
ISBN:978-1-4398-3401-5
Pages:976
Hardcopy:$189.95
 
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