Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites

Nanoscale Materials Characterization Chapter 1

Advances in Helium Ion Microscopy for High Resolution Imaging and Material Modification

Authors: W. Thompson, J. Notte, L. Scipioni, M. Ananth, L. Stern, S. Sijbrandij, C. Sanford

Affilation: Carl Zeiss SMT, United States

Pages: 25 - 28

Keywords: helium ion microscopy, sub-nanometer image resolution, graphene, soft materials collagen fibers

Abstract:
The helium ion microscope routinely obtains sub-nanometer resolution on uncoated soft materials with a high signal to damage ratio. In addition to its high resolution imaging capability, the microscope has been successful at sub-nanometer film thickness determination, the patterning of 5 nm free standing graphene wires and the ion induced deposition of a 30nm, 6 micron high, free standing tungsten pillar. We will discuss the microscope and these various recent applications.

Advances in Helium Ion Microscopy for High Resolution Imaging and Material Modification

ISBN: 978-1-4398-3401-5
Pages: 976
Hardcopy: $189.95