Nano Science and Technology Institute
Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites
Chapter 1: Nanoscale Materials Characterization

Advances in Helium Ion Microscopy for High Resolution Imaging and Material Modification

Authors:W. Thompson, J. Notte, L. Scipioni, M. Ananth, L. Stern, S. Sijbrandij, C. Sanford
Affilation:Carl Zeiss SMT, US
Pages:25 - 28
Keywords:helium ion microscopy, sub-nanometer image resolution, graphene, soft materials collagen fibers
Abstract:The helium ion microscope routinely obtains sub-nanometer resolution on uncoated soft materials with a high signal to damage ratio. In addition to its high resolution imaging capability, the microscope has been successful at sub-nanometer film thickness determination, the patterning of 5 nm free standing graphene wires and the ion induced deposition of a 30nm, 6 micron high, free standing tungsten pillar. We will discuss the microscope and these various recent applications.
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