Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites

Nanoscale Materials Characterization Chapter 1

Individual SiGe Nanowire Chemical Composition Depth Profiling and Surface Oxidation Analyzed by Auger Electron Spectroscopy

Authors: J.S. Hammond, U. Givan, D. Paul, F. Patolsky

Affilation: Physical Electronics USA, United States

Pages: 21 - 24

Keywords: nanowire, SiGe, Auger electron spectroscopy

Abstract:
The lateral and depth distributions of the surface oxidation and the surface Phosphorous doping concentrations have been measured from an individual SixGe(1-x) 60 nm diameter nanowire with Auger Electron Spectroscopy combined with sputter ion depth profiling. The surface imaging spectroscopy characterization of the CVD-LVS grown nanowires interpret the conductivity measurements of the nanowires.

Individual SiGe Nanowire Chemical Composition Depth Profiling and Surface Oxidation Analyzed by Auger Electron Spectroscopy

ISBN: 978-1-4398-3401-5
Pages: 976
Hardcopy: $189.95