Nano Science and Technology Institute
Nanotech 2010 Vol. 1
Nanotech 2010 Vol. 1
Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites
Chapter 1: Nanoscale Materials Characterization

Individual SiGe Nanowire Chemical Composition Depth Profiling and Surface Oxidation Analyzed by Auger Electron Spectroscopy

Authors:J.S. Hammond, U. Givan, D. Paul, F. Patolsky
Affilation:Physical Electronics USA, US
Pages:21 - 24
Keywords:nanowire, SiGe, Auger electron spectroscopy
Abstract:The lateral and depth distributions of the surface oxidation and the surface Phosphorous doping concentrations have been measured from an individual SixGe(1-x) 60 nm diameter nanowire with Auger Electron Spectroscopy combined with sputter ion depth profiling. The surface imaging spectroscopy characterization of the CVD-LVS grown nanowires interpret the conductivity measurements of the nanowires.
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