Authors: M. Niessner, G. Schrag, G. Wachutka, J. Iannacci, B. Margesin
Affilation: Munich University of Technology, Germany
Pages: 655 - 658
Keywords: RF switch, MEMS, macromodel, mixed-level model, system-level model
In this work, we present a mixed-level model of an electrostatically actuated and viscously damped ohmic radio frequency (RF) microelectromechanical switch, which provides an accurate physical description of the device behavior and is suitable for direct implementation into standard circuit simulators. The coupled multi-energy domain model is derived on the basis of an hierarchical modeling approach, and applying a dedicated MATLAB-based toolbox for automatic model generation. Model calibration and transient measurements are performed using white light interferometry. The measured and simulated data show excellent agreement. This demonstrates the power of our modeling approach and, in particular, the predictiveness w.r.t. “real world” experiments.