Nano Science and Technology Institute
Nanotech 2009 Vol. 3
Nanotech 2009 Vol. 3
Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling
Chapter 5: Modeling and Simulation of Micro and Nano Systems

A Physical Based Hot Carrier Injection Compact Model for Nanoscale FinFET

Authors:C. Ma, B. Li, L. Zhang, J. He, X. Zhang, X. Lin
Affilation:Peking University, CN
Pages:375 - 378
Keywords:reliability, HCI, model, mobility, Nanoscale FinFET
Abstract:A detail analysis for nanoscale FinFET performance degradation induced by the Hot Carrier Injection (HCI) is given in this paper, and a physical based HCI compact model adapted to all the operation modes is presented. It is concluded that in the depletion and weak reverse region, the degradation of carrier mobility is the dominant impact on the current decrease; in the strong inversion region, the current decrease is determined by the loss of inversion charges trapped in the interface states. With the analysis, a compact HCI model for Nanoscale FinFET is derived and validated in both forward and reverse operation mode. The simulation result agrees very well with the measured data.
A Physical Based Hot Carrier Injection Compact Model for Nanoscale FinFETView PDF of paper
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