Nanotech 2009 Vol. 3
Nanotech 2009 Vol. 3
Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling

Modeling and Simulation of Micro and Nano Systems Chapter 5

Sacrificial membranes for serial valving in microsystems

Authors: M. Allain, J. Berthier, S. Basrour, P. Pouteau

Affilation: Cea-Leti Minatec, France

Pages: 343 - 346

Keywords: microvalves, microfluidics, sacrificial membranes, Joule heating, ultimate stress

Valving is essential to microflow circuits in microsystem technology. Many different types of valves have already been designed. Membranes of sacrificial materials have been studied for one shot valving; however, the new design proposed here, based on sacrificial micro-membranes with embedded electrodes, has the advantages to be more efficient than the previous existing devices, to produce calibrated openings, to be easy to pilot and to connect easily successively, one by one, a series of initially isolated micro-chambers of a silicon chip.

Sacrificial membranes for serial valving in microsystems

ISBN: 978-1-4398-1784-1
Pages: 694
Hardcopy: $179.95