Sacrificial membranes for serial valving in microsystems

	Nanotech 2009 Vol. 3 Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling Chapter 5: Modeling and Simulation of Micro and Nano Systems
	Sacrificial membranes for serial valving in microsystems
Authors:	M. Allain, J. Berthier, S. Basrour, P. Pouteau
Affilation:	Cea-Leti Minatec, FR
Pages:	343 - 346
Keywords:	microvalves, microfluidics, sacrificial membranes, Joule heating, ultimate stress
Abstract:	Valving is essential to microflow circuits in microsystem technology. Many different types of valves have already been designed. Membranes of sacrificial materials have been studied for one shot valving; however, the new design proposed here, based on sacrificial micro-membranes with embedded electrodes, has the advantages to be more efficient than the previous existing devices, to produce calibrated openings, to be easy to pilot and to connect easily successively, one by one, a series of initially isolated micro-chambers of a silicon chip.
ISBN:	978-1-4398-1784-1
Pages:	694
Hardcopy:	$179.95

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