Nano Science and Technology Institute
Nanotech 2009 Vol. 3
Nanotech 2009 Vol. 3
Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling
Chapter 5: Modeling and Simulation of Micro and Nano Systems

Finite Element Method and Genetic Algorithm for Analysis MEMS

Authors:V.H. Ortiz, I. Chairez
Affilation:Biochip Bubbles, MX
Pages:335 - 338
Keywords:FEM, genetic algorithm, MEMS
Abstract:This paper presents an analysis of the finite element method (FEM) and genetic algorithms for the analysis of MEMS and BIOMEMS design. The finite element method is the method used for the computational analysis of mechanical structures in MEMS, BIOMEMS, among others. However, the FEM presents a major drawback: the generation of mesh does not meet any criterion optimization, which in turn prevents ensure the best possible reproduction of the structure to analyze. This is because the mesh automatically generated by the FEM in its original conception, are generated according to the outline of the movie studio, which prevents the mesh ensure that span the entire domain of the image. Genetic algorithms are a particularly robust computational method, which have demonstrated their ability to solve problems where optimization requires adjustment of a large number of parameters (multivariate) even when they are not competing performance indices (multiobjective). In addition to improving the process can be a good way to educate mechanics computational applications in MEMS, BIOMEMS among others, and an example of this is used by the American company ARGOR.
Finite Element Method and Genetic Algorithm for Analysis MEMSView PDF of paper
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