Nano Science and Technology Institute
Nanotech 2009 Vol. 3
Nanotech 2009 Vol. 3
Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling
Chapter 5: Modeling and Simulation of Micro and Nano Systems

An Online Tool for Simulating Electro-Thermo-Mechanical Flexures Using Distributed and Lumped Analyses

Authors:F. Li, J.V. Clark
Affilation:Purdue University, US
Pages:252 - 255
Keywords:electro-thermo-mechanical modeling, online software tool, FEA, lumped model analysis
Abstract:We present an online software tool that enables both novices and experts to quickly and fairly accurately model and simulate an electro-thermo-mechanical microdevice. We model and simulate a MEMS thermal actuator by coupling finite element analysis (FEA) with network analysis. Commercial FEA software and SUGAR package are integrated in MATLAB for the simulation process. The simulation result is comparable to the experimental data. The thermo-mechanical part of the tool has free-access on with the support of RAPPTURE Toolkit.
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