 | Nanotech 2009 Vol. 1
Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
Chapter 5: MEMS and NEMS |
Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization | |
| Authors: | S.-S. Je, J. Kim, M.N. Kozicki, J. Chae |
| Affilation: | Arizona State University, US |
| Pages: | 436 - 439 |
| Keywords: | hearing aids, fitting, MEMS, microphone, nano-electrodeposits |
| Abstract: | We present an in-situ non-electronic method for MEMS (Micro-Electro-Mechanical-Systems) microphone optimization by sensitivity adjustment via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits are electrochemically deposited/dissolved on a Ag-doped GeSe solid electrolyte film on a microphone diaphragm. The growth/retraction of the nano-electrodeposits generates mass/stress redistribution on the diaphragm, tuning the microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate that the directional microphone can achieve a 1.3dB Directivity Index (DI) improvement. |
| ISBN: | 978-1-4398-1782-7 |
| Pages: | 702 |
| Hardcopy: | $179.95 |
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