Nano Science and Technology Institute
Nanotech 2009 Vol. 1
Nanotech 2009 Vol. 1
Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
Chapter 4: Nanoscale Characterization

Evaluation of Uncertainty in Nanoparticle Size Measurement by Electro-gravitational Aerosol Balance

Authors:C.-M. Lin, T.-C. Yu, S.-P. Pan, H.-F. Wang, C.-J. Chen
Affilation:Industrial Technology Research Institute, TW
Pages:338 - 341
Keywords:uncertainty, nanoparticle size, electro-gravitational aerosol balance
Abstract:A primary standard of particle size ranging from 100 nm to 500 nm in number mean diameter, based on the electro-gravitational aerosol balance, has been developed in Center for Measurement Standards of Industrial Technology Research Institute. The particles certified by the primary standard system are used as size standards to calibrate various types of nanoparticle size measurement instruments. In the measurement system, charged particles are introduced into parallel plate electrodes, and the particle survival rate after a certain holding time is measured as a function of the applied voltage. The number average diameter is determined by fitting a theoretical curve equation to experimental data. Based on the survival function, system evaluation was conducted on the system in according to the ISO “Guide to the expression of uncertainty in measurement.” Since the measurement principle is the simple, this method is expected to achieve high accuracy and low uncertainty.
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