Nanotech 2009 Vol. 1
Nanotech 2009 Vol. 1
Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics

Nanoscale Characterization Chapter 4

Scanning Probe Charge Reading of Ferroelectric Polarization with Nanoscale Resolution

Authors: B.M. Kim, D.E. Adams, Q. Tran, Q. Ma, V. Rao

Affilation: Nanochip, Inc., United States

Pages: 289 - 290

Keywords: probe, R/W, charge, ferroelectricity, piezoelectricity

Probe storage with epitaxial ferroelectric PbZr0.2Ti0.8O3 (PZT) media [1, 2] is a promising technology for terabyte/inch2 storage devices because nanoscale and nonvolatile polarizations may be reversibly written and read by a scanning probe tip. Piezoresponse Force Microscopy (PFM) [1] is a popular Scanning Force Microscopy (SFM)-based polarization bit reading technique that relies on an optical setup of SFM with lock-in technique to read piezoresponse motion of ferroelectric domains. Compared to PFM, Scanning Probe Charge Reading Technique (SPCRT) [2] uses an exclusively electrical setup comprising a charge amplifier to read charge signals associated with ferroelectric domains. A variant mode of SPCRT implemented with lock-in technique is demonstrated here to resolve bit charge on PZT with nanoscale spatial resolution. [1] T. Tybell, C. H. Ahn, and J.-M. Triscone, Appl. Phys. Lett. 72(12), 1454 (1998) [2] B. M. Kim, D. E. Adams, Q. Tran, Q. Ma and V. Rao, Appl. Phys. Lett. 94(7), (2009). in press.

ISBN: 978-1-4398-1782-7
Pages: 702
Hardcopy: $179.95

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