Nano Science and Technology Institute
Nanotech 2009 Vol. 1
Nanotech 2009 Vol. 1
Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
 
Chapter 1: Nano Fabrication
 

A Precise Reclaim Fabrication by Nanoscale Removal Processes using a Design of Ellipsoidal Anode

Authors:P.S. Pa
Affilation:National Taipei University of Education, TW
Pages:49 - 52
Keywords:nanoscale processes, reclaim fabrication, ellipsoidal anode, micro-electrochemical etching, conductive microstructure
Abstract:A new design of ellipsoidal anode using micro-electrochemical etching as a precise reclaim fabrication by nanoscale removal processes for In2O3SnO2 conductive microstructure from a surface of display’s color filter surface is presented. Through the design of the ellipsoidal tool electrode, scoring of the display’s color filter surface is eliminated, thereby enhancing the feed rate of the workpiece (display’s color filter) and reducing production costs. In the current study, a higher current rating with a quicker workpiece feed rate effectively achieves fast promotion of the removal effect. A small major axis of the ellipsoidal anode accompanies with a small gap-width between the cathode and the workpiece surface takes less time for the same amount of In2O3SnO2 removal. A small minor axis of the ellipsoidal anode, or a small thickness of the cathode provides larger discharge mobility and better removal ef-fect. A small arc rounding radius of the ellipsoidal anode or a small end radius of the cathode corresponds to a higher removal rate for In2O3SnO2. An effective ellipsoidal anode provides larger discharge mobility and better removal effect. It only needs a short period of time to remove the In2O3SnO2 easily and cleanly.
ISBN:978-1-4398-1782-7
Pages:702
Hardcopy:$179.95
 
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