Nano Science and Technology Institute
Nanotech 2009 Vol. 1
Nanotech 2009 Vol. 1
Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
Chapter 1: Nano Fabrication

The first Italian micro exposure tool for EUV lithography: design guidelines and experimental results

Authors:F. Flora, S. Bollanti, P. Di Lazzaro, L. Mezi, D. Murra, A. Torre
Affilation:ENEA, IT
Pages:33 - 36
Keywords:EUV source, EUVL, laser-plasma, Schwarzschild optic, MET
Abstract:The first Italian Micro Exposure Tool (MET) for EUV lithography has been developed at the ENEA Research Laboratories in Frascati (Italy). In spite of the very low cost of the Schwarzschild optics, the specific design of the low vibration board and the innovative alignment technique (a modified Foucault technique) applied to the Schwarzschild optics allowed the achievement of a resolution better than 100 nm on a wafer coated with a PMMA photoresist
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