Authors: J.V. Clark, Y. Zeng, P. Jha
Affilation: Purdue University, United States
Pages: 509 - 512
Keywords: MEMS, CAD/CAE, design methodology, system modeling, analysis, simulation, FEM
We present advances in designing and modeling complex microsystems at the network/system-level. For design, we develop a graphical user interface that allows users to quickly configure complex systems in 3D using a computer mouse or pen. And we couple it with a powerful Matlab-based netlist language for design flexibility. For modeling, we apply recent advances in analytical system dynamics and differential-algebraic equations into a framework that facilitates the systematic modeling of multidisciplinary systems with holonomic and nonholonomic constraints. For a test case, we efficiently simulate a microsystem comprising gears, hinges, slider, electronic components, comb drives, and electromechanical flexures. In comparison, it is difficult to model, configure, and simulate such a microsystem using conventional tools.