Nano Science and Technology Institute
Nanotech 2008 Vol. 3
Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 5: Modeling & Simulation of Microsystems
 

Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms

Authors:R. Khalilyulin, G. Schrag, G. Wachutka
Affilation:Munich University of Technology, DE
Pages:505 - 508
Keywords:MEMS gyroscope, damping, package vibrations, manufactoring tolerances
Abstract:We present a high-level model of a dual gimbaled mass gyroscope, which provides an accurate physical description of the impact of external and internal disturbances on the output signal, but which also allows for the efficient analysis and optimization of the full sensor system including the electronic circuitry for drive, control, and signal conditioning. The dynamics of the gyroscope is described by a reduced-order high-level model with 24 degrees of freedom, which is based on the Langrangian equations of motion. Internal disturbances (manufacturing tolerances, e.g.) as well as external impact factors (pressure-dependent viscous damping, shock, vibrations of the housing, etc.) have been included in the model equations by introducing physically-based, parametrized functions extracted from detailed FEM or mixed-level simulations. After calibration, detailed sensitivity analyses of the sensor output signal with respect to the individual disturbing factors have been carried out. Since the proposed high-level model combines computational efficiency with physical transparency and accuracy on system level, it provides the proper basis for on-going research activities focusing on the design of control algorithms which minimize or even eliminate these impacts on the sensor system and, thus, enhance the quality of signal conditioning.
Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control AlgorithmsView PDF of paper
ISBN:978-1-4200-8505-1
Pages:940
Hardcopy:$159.95
 
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