Nano Science and Technology Institute
Nanotech 2008 Vol. 3
Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Sensors & Systems

Building Micro-Robots: A path to sub-mm3 autonomous systems

Authors:J.R. Reid, V. Vasilyev, R.T. Webster
Affilation:US Air Force Research Laboratory, US
Pages:174 - 177
Keywords:MEMS, micro-robots, self assembly
Abstract:A process for fabricating sub-cubic millimeter, fully autonomous micro-robots is presented. Details of the process flow and intial prototype structures are demonstrated. In addition, the design of an electrostatic actuator array for moving the robot will be detailed and results from experiments on the prototype spheres are provided. Finally, a system level power model of the micro-robot will be detailed to show that significant functionality can be achieved in such a compact robot.
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