Authors: J.R. Reid, V. Vasilyev, R.T. Webster
Affilation: US Air Force Research Laboratory, United States
Pages: 174 - 177
Keywords: MEMS, micro-robots, self assembly
A process for fabricating sub-cubic millimeter, fully autonomous micro-robots is presented. Details of the process flow and intial prototype structures are demonstrated. In addition, the design of an electrostatic actuator array for moving the robot will be detailed and results from experiments on the prototype spheres are provided. Finally, a system level power model of the micro-robot will be detailed to show that significant functionality can be achieved in such a compact robot.