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 | Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Sensors & Systems |
| | Nano-gap high quality factor thin film SOI MEM resonators | | Authors: | D. Grogg, C.H. Tekin, D.N. Badila-Ciressan, D. Tsamados, M. Mazza, M.A. Ionescu | | Affilation: | Ecole Polytechnique Fédérale de Lausanne, CH | | Pages: | 215 - 218 | | Keywords: | microelectromechanical systems, MEMS, electrostatic devices, resonators, quality factor (Q) | | Abstract: | A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization voltages. A motional resistance of 55 k is measured at 18 V DC polarization and values still below 100 k can be measured at 14 V. | | ISBN: | 978-1-4200-8505-1 |
| Pages: | 940 |
| Hardcopy: | $199.99 |
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