 | Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Sensors & Systems |
Nano-gap high quality factor thin film SOI MEM resonators | |
| Authors: | D. Grogg, C.H. Tekin, D.N. Badila-Ciressan, D. Tsamados, M. Mazza, M.A. Ionescu |
| Affilation: | Ecole Polytechnique Fédérale de Lausanne, CH |
| Pages: | 215 - 218 |
| Keywords: | microelectromechanical systems, MEMS, electrostatic devices, resonators, quality factor (Q) |
| Abstract: | A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization voltages. A motional resistance of 55 k is measured at 18 V DC polarization and values still below 100 k can be measured at 14 V. |
| ISBN: | 978-1-4200-8505-1 |
| Pages: | 940 |
| Hardcopy: | $159.95 |
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