Nanotech 2008 Vol. 3
Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3

Sensors & Systems Chapter 2

Silicon on ceramics - a new concept for micro-nano-integration on wafer level
M. Fischer, H. Bartsch de Torres, B. Pawlowski, M. Mach, R. Gade, S. Barth, M. Hoffmann, J. Müller
Technische Universität Ilmenau, DE

Micro to Nano – Scaling Packaging Technologies for Future Microsystems
T. Braun, K.-F. Becker, J. Bauer, F. Hausel, B. Pahl, O. Wittler, R. Mrossko, E. Jung, A. Ostmann, M. Koch, V. Bader, C. Minge, R. Aschenbrenner, H. Reichl
Technical University Berlin, DE

Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications
S. Fiedler, M. Zwanzig, M.S. Jäger, M. Böttcher
Fraunhofer Institute for Reliability and Microintegration, DE

MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage
J.S. Krause, R.D. White, M.J. Moeller, J.M. Gallman, R. De Jong
Tufts University, US

Building Micro-Robots: A path to sub-mm3 autonomous systems
J.R. Reid, V. Vasilyev, R.T. Webster
US Air Force Research Laboratory, US

Pressure sensor data processing for vertical velocity measurement
M. Husak, J. Jakovenko, L. Stanislav
Czech Technical University in Prague, CZ

Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction
P. Pietrzak, B. Pekoslawski, M. Makowski, A. Napieralski
Technical University of Lodz, PL

Microsystems on their Way to Smart Systems
L. Heinze
VDI/VDE Innovation + Technik GmbH, DE

A 20 µm Movable Micro Mobile
J. Jeon, J.-B. Lee, M.J. Kim
The University of Texas at Dallas, US

Development of Active Systems for Military Utilization
J.L. Zunino III., H.C. Lim
US Army ARDEC, US

Sensing Weak Magnetic Field By Leaving Biosystems and A Magnetoreseption Mechanism For Navigation
S.E. Lyshevski
Rochester Institute of Technology, US

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes
M. Haris, H. Qu, A. Jain, H. Xie
Oakland University, US

Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
H.-J. Quenzer, R. Dudde, H. Jacobsen, B. Wagner, H. Föll
Fraunhofer ISIT, DE

10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint
N-H Chen, H.J.H. Chen, C-H Lin, F-S Huang
National Tsing Hua University, TW

Nano-gap high quality factor thin film SOI MEM resonators
D. Grogg, C.H. Tekin, D.N. Badila-Ciressan, D. Tsamados, M. Mazza, M.A. Ionescu
Ecole Polytechnique Fédérale de Lausanne, CH

Multiband THz detection and imaging devices
L. Popa-Simil, I.L. Popa-Simil
LAVM LLC, US

Feasibility Study of Cochlear-like Acoustic Sensor using PMN-PT Single Crystal Cantilever Array
S. Hur, S.Q. Lee, W.D. Kim
Korea Institute of Machnery & Materials, KR


ISBN: 978-1-4200-8505-1
Pages: 940
Hardcopy: $159.95