Sensors & Systems

	Nanotech 2008 Vol. 3 Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 2: Sensors & Systems
-	Silicon on ceramics - a new concept for micro-nano-integration on wafer level
	M. Fischer, H. Bartsch de Torres, B. Pawlowski, M. Mach, R. Gade, S. Barth, M. Hoffmann, J. Müller
	Technische Universität Ilmenau, DE
-	Micro to Nano – Scaling Packaging Technologies for Future Microsystems
	T. Braun, K.-F. Becker, J. Bauer, F. Hausel, B. Pahl, O. Wittler, R. Mrossko, E. Jung, A. Ostmann, M. Koch, V. Bader, C. Minge, R. Aschenbrenner, H. Reichl
	Technical University Berlin, DE
-	Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications
	S. Fiedler, M. Zwanzig, M.S. Jäger, M. Böttcher
	Fraunhofer Institute for Reliability and Microintegration, DE
-	MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage
	J.S. Krause, R.D. White, M.J. Moeller, J.M. Gallman, R. De Jong
	Tufts University, US
-	Building Micro-Robots: A path to sub-mm3 autonomous systems
	J.R. Reid, V. Vasilyev, R.T. Webster
	US Air Force Research Laboratory, US
-	Pressure sensor data processing for vertical velocity measurement
	M. Husak, J. Jakovenko, L. Stanislav
	Czech Technical University in Prague, CZ
-	Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction
	P. Pietrzak, B. Pekoslawski, M. Makowski, A. Napieralski
	Technical University of Lodz, PL
-	Microsystems on their Way to Smart Systems
	L. Heinze
	VDI/VDE Innovation + Technik GmbH, DE
-	A 20 µm Movable Micro Mobile
	J. Jeon, J.-B. Lee, M.J. Kim
	The University of Texas at Dallas, US
-	Development of Active Systems for Military Utilization
	J.L. Zunino III., H.C. Lim
	US Army ARDEC, US
-	Sensing Weak Magnetic Field By Leaving Biosystems and A Magnetoreseption Mechanism For Navigation
	S.E. Lyshevski
	Rochester Institute of Technology, US
-	Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes
	M. Haris, H. Qu, A. Jain, H. Xie
	Oakland University, US
-	Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
	H.-J. Quenzer, R. Dudde, H. Jacobsen, B. Wagner, H. Föll
	Fraunhofer ISIT, DE
-	10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint
	N-H Chen, H.J.H. Chen, C-H Lin, F-S Huang
	National Tsing Hua University, TW
-	Nano-gap high quality factor thin film SOI MEM resonators
	D. Grogg, C.H. Tekin, D.N. Badila-Ciressan, D. Tsamados, M. Mazza, M.A. Ionescu
	Ecole Polytechnique Fédérale de Lausanne, CH
-	Multiband THz detection and imaging devices
	L. Popa-Simil, I.L. Popa-Simil
	LAVM LLC, US
-	Feasibility Study of Cochlear-like Acoustic Sensor using PMN-PT Single Crystal Cantilever Array
	S. Hur, S.Q. Lee, W.D. Kim
	Korea Institute of Machnery & Materials, KR
ISBN:	978-1-4200-8505-1
Pages:	940
Hardcopy:	$159.95

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