 | Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Sensors & Systems |
| - | Silicon on ceramics - a new concept for micro-nano-integration on wafer level |
| | M. Fischer, H. Bartsch de Torres, B. Pawlowski, M. Mach, R. Gade, S. Barth, M. Hoffmann, J. Müller |
| | Technische Universität Ilmenau, DE |
| - | Micro to Nano – Scaling Packaging Technologies for Future Microsystems |
| | T. Braun, K.-F. Becker, J. Bauer, F. Hausel, B. Pahl, O. Wittler, R. Mrossko, E. Jung, A. Ostmann, M. Koch, V. Bader, C. Minge, R. Aschenbrenner, H. Reichl |
| | Technical University Berlin, DE |
| - | Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications |
| | S. Fiedler, M. Zwanzig, M.S. Jäger, M. Böttcher |
| | Fraunhofer Institute for Reliability and Microintegration, DE |
| - | MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage |
| | J.S. Krause, R.D. White, M.J. Moeller, J.M. Gallman, R. De Jong |
| | Tufts University, US |
| - | Building Micro-Robots: A path to sub-mm3 autonomous systems |
| | J.R. Reid, V. Vasilyev, R.T. Webster |
| | US Air Force Research Laboratory, US |
| - | Pressure sensor data processing for vertical velocity measurement |
| | M. Husak, J. Jakovenko, L. Stanislav |
| | Czech Technical University in Prague, CZ |
| - | Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction |
| | P. Pietrzak, B. Pekoslawski, M. Makowski, A. Napieralski |
| | Technical University of Lodz, PL |
| - | Microsystems on their Way to Smart Systems |
| | L. Heinze |
| | VDI/VDE Innovation + Technik GmbH, DE |
| - | A 20 µm Movable Micro Mobile |
| | J. Jeon, J.-B. Lee, M.J. Kim |
| | The University of Texas at Dallas, US |
| - | Development of Active Systems for Military Utilization |
| | J.L. Zunino III., H.C. Lim |
| | US Army ARDEC, US |
| - | Sensing Weak Magnetic Field By Leaving Biosystems and A Magnetoreseption Mechanism For Navigation |
| | S.E. Lyshevski |
| | Rochester Institute of Technology, US |
| - | Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes |
| | M. Haris, H. Qu, A. Jain, H. Xie |
| | Oakland University, US |
| - | Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering |
| | H.-J. Quenzer, R. Dudde, H. Jacobsen, B. Wagner, H. Föll |
| | Fraunhofer ISIT, DE |
| - | 10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint |
| | N-H Chen, H.J.H. Chen, C-H Lin, F-S Huang |
| | National Tsing Hua University, TW |
| - | Nano-gap high quality factor thin film SOI MEM resonators |
| | D. Grogg, C.H. Tekin, D.N. Badila-Ciressan, D. Tsamados, M. Mazza, M.A. Ionescu |
| | Ecole Polytechnique Fédérale de Lausanne, CH |
| - | Multiband THz detection and imaging devices |
| | L. Popa-Simil, I.L. Popa-Simil |
| | LAVM LLC, US |
| - | Feasibility Study of Cochlear-like Acoustic Sensor using PMN-PT Single Crystal Cantilever Array |
| | S. Hur, S.Q. Lee, W.D. Kim |
| | Korea Institute of Machnery & Materials, KR |
| - | Silicon on ceramics - a new concept for micro-nano-integration on wafer level |
| | M. Fischer, H. Bartsch de Torres, B. Pawlowski, M. Mach, R. Gade, S. Barth, M. Hoffmann, J. Müller |
| | Technische Universität Ilmenau, DE |
| - | Micro to Nano – Scaling Packaging Technologies for Future Microsystems |
| | T. Braun, K.-F. Becker, J. Bauer, F. Hausel, B. Pahl, O. Wittler, R. Mrossko, E. Jung, A. Ostmann, M. Koch, V. Bader, C. Minge, R. Aschenbrenner, H. Reichl |
| | Technical University Berlin, DE |
| - | Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications |
| | S. Fiedler, M. Zwanzig, M.S. Jäger, M. Böttcher |
| | Fraunhofer Institute for Reliability and Microintegration, DE |
| - | MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage |
| | J.S. Krause, R.D. White, M.J. Moeller, J.M. Gallman, R. De Jong |
| | Tufts University, US |
| - | Building Micro-Robots: A path to sub-mm3 autonomous systems |
| | J.R. Reid, V. Vasilyev, R.T. Webster |
| | US Air Force Research Laboratory, US |
| - | Pressure sensor data processing for vertical velocity measurement |
| | M. Husak, J. Jakovenko, L. Stanislav |
| | Czech Technical University in Prague, CZ |
| - | Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction |
| | P. Pietrzak, B. Pekoslawski, M. Makowski, A. Napieralski |
| | Technical University of Lodz, PL |
| - | Microsystems on their Way to Smart Systems |
| | L. Heinze |
| | VDI/VDE Innovation + Technik GmbH, DE |
| - | A 20 µm Movable Micro Mobile |
| | J. Jeon, J.-B. Lee, M.J. Kim |
| | The University of Texas at Dallas, US |
| - | Development of Active Systems for Military Utilization |
| | J.L. Zunino III., H.C. Lim |
| | US Army ARDEC, US |
| - | Sensing Weak Magnetic Field By Leaving Biosystems and A Magnetoreseption Mechanism For Navigation |
| | S.E. Lyshevski |
| | Rochester Institute of Technology, US |
| - | Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes |
| | M. Haris, H. Qu, A. Jain, H. Xie |
| | Oakland University, US |
| - | Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering |
| | H.-J. Quenzer, R. Dudde, H. Jacobsen, B. Wagner, H. Föll |
| | Fraunhofer ISIT, DE |
| - | 10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint |
| | N-H Chen, H.J.H. Chen, C-H Lin, F-S Huang |
| | National Tsing Hua University, TW |
| - | Nano-gap high quality factor thin film SOI MEM resonators |
| | D. Grogg, C.H. Tekin, D.N. Badila-Ciressan, D. Tsamados, M. Mazza, M.A. Ionescu |
| | Ecole Polytechnique Fédérale de Lausanne, CH |
| - | Multiband THz detection and imaging devices |
| | L. Popa-Simil, I.L. Popa-Simil |
| | LAVM LLC, US |
| - | Feasibility Study of Cochlear-like Acoustic Sensor using PMN-PT Single Crystal Cantilever Array |
| | S. Hur, S.Q. Lee, W.D. Kim |
| | Korea Institute of Machnery & Materials, KR |
| ISBN: | 978-1-4200-8505-1 |
| Pages: | 940 |
| Hardcopy: | $199.99 |
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| Order: | Mail/Fax Form |
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