Authors: F.Y. Shen, N.H. Chen, K-Y Lam, J.H. Chen, F-S Huang
Affilation: National Tsing Hua University, Taiwan
Pages: 270 - 273
Keywords: contact imprinting, HSQ, Aminosilane, Anti-Mouse protein
The purpose of this paper is to develop nano-contact imprint technology with simple process by using soft HSQ (hydrogen silsesquioxane) mold transfer aminosilane ink on HSQ and glass substrates with binding Glutraic dialdehyde (GA) and Affinipure Goat Anti-Mouse igG(H+L) protein sequentially for bio application. HSQ molds were fabricated by low-dose e-beam lithography with various wires width, 80nm~200nm, the ratio of line width and space is 1:10 and 1:1, Aminosilane was used as ink, the nano-features on the HSQ stamps were successfully transferred onto the substrates with strong adhesion under specific conditions in the range of 350~450W O2 plasma treatment for 30 s and 10~35 psi imprinting pressure for 30s. We used AFM to measure the nano line before and after soaking with GA and Anti-Mouse igG(H+L) protein of transfer aminosilane pattern and to observe the protein was absorbed with aminosilane successfully. The layer thickness of GA with protein is about 5 nm. As we know, the size of the Anti-Mouse protein is 5nm*5nm*30nm. This indicates an approximate monolayer of absorbed igG(H+L) protein on the GA bound to patterned aminosilane nano line. Bio application on sensors and facilitate will be investigated further.