Nanotech 2008 Vol. 1
Nanotech 2008 Vol. 1
Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1

Initiatives, Education & Policy Chapter 7

MEMS and NEMS research for education

Authors: M. Husak, J. Jakovenko

Affilation: Czech Technical University in Prague, Czech Republic

Pages: 1057 - 1060

Keywords: MEMS, NEMS, microsystems, nanosystems, nanoelectronics, nanotechnology

The paper describes methods of active involvement of students in research work and application of research work results in educational process. Individual tasks are parts of solutions of large research projects. Individual work contributes to their professional forming. The research in the area of nanoelectronics (MEMS and NEMS) is discussed. The use of special instrument, microscope and other nanotechnology workplaces in the different institutes is necessary. The education involves nanomaterials and smart materials for sensor and smart micro and nanosystems. For example, students can be invited into the laboratory of semiconductors in order to take a closer look with atomic force microscope (AFM). The microscope is used for three dimensional imaging of nano objects and surfaces in nano scale. The students can learn several AFM techniques that provide not only surface imaging in contact and semicontact regimes but also measurement of electrical properties of surface, local anodic oxidation of material’s surface, nanomanipulation etc. A new method for education in the area of nanotechnology, narrow connection research and education, use of the nanotechnology equipment (AFM, nanolitography, etc.). The effort is targeted at the connection of the research an education, connection different workplaces from the different institutes.

MEMS and NEMS research for education

ISBN: 978-1-4200-8503-7
Pages: 1,118
Hardcopy: $159.95