Mechanical characterization of electrostatic MEMS switches

	Nanotech 2008 Vol. 1 Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1 Chapter 6: Characterization
	Mechanical characterization of electrostatic MEMS switches
Authors:	F. Souchon, A. Koszewski, D. Levy, PL. Charvet
Affilation:	CEA/LETI/MINATEC, FR
Pages:	885 - 888
Keywords:	MEMS, nanoindentation, stiffness, gap height, mechanical model
Abstract:	The paper presents a methodology with nanoindentation experiments to characterize the mechanical properties of MEMS switches. After that, simple analytical models for mechanical and electrostatic aspects are used to validate these mechanical characterizations. At the end, the electrostatic behavior of switches are well-understood thanks to the mechanical charaterizations. the complete abstract is avalaible in a pdf file
ISBN:	978-1-4200-8503-7
Pages:	1,118
Hardcopy:	$159.95

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