Authors: T. Schwamb, N. Schirmer, D. Poulikakos
Affilation: ETH Zürich, Switzerland
Pages: 581 - 583
Keywords: carbon nanotubes, dielectrophoresis, fountain-pen setup
Herein, we present a novel fabrication method for the integration of special nanoparticles such as nanowires and carbon nanotubes into NEMS/MEMS. To this end, we combined the dielectrophoretic deposition of carbon nanotubes with a fountain-pen setup. Our method is capable assembling CNT nanodevices with integrated freestanding individual carbon nanotubes. The yield and the preciseness of the individual CNT deposition are superior to other deposition methods. A larger scale assembly of future CNT-integrated chips is enabled.